Author/Authors :
Quan، نويسنده , , Baofu and Sun، نويسنده , , Chengsong and Wang، نويسنده , , Zhe and Quan، نويسنده , , Haiying and Zhou، نويسنده , , Lijun and Li، نويسنده , , Yunpeng، نويسنده ,
Abstract :
Planar heat-wire type sensors based on SnO2 and molecular sieve were fabricated by means of RF sputtering. With the filtering and catalyzing effect of molecular sieve, the sensor can detect CH4 with high sensitivity and high selectivity.