An advanced micromachined fermentation monitoring device

This paper describes the design and fabrication of a novel sensor for the monitoring of fermentation processes, e.g. the time-resolved amount of living cells in fluids. The device consists of two comb-electrodes patterned on a freestanding membrane. The novelty of this device is the capability to clean it ultrasonically on chip, i.e. by electrostatic excitation of the membrane on which the electrodes are placed.