Gold and platinum as ozone sensitive layer in work-function gas sensors

Hybrid suspended gate FET (HSGFET) devices with a sensitive layer of platinum or gold were proven to be well-suited as reproducible ozone detection from the low ppb region up to 500 ppb and higher. Operating at 130°C, gold shows a nearly linear dependence on ozone concentration with high signals and a small humidity influence. Platinum at 130°C convinces with a fast response time and low cross sensitivities to other gases.