Title of article
Crystallographic characterization of In2O3 films deposited by spray pyrolysis
Author/Authors
G. Korotcenkov، نويسنده , , G. and Brinzari، نويسنده , , V. and Cerneavschi، نويسنده , , A. and Cornet، نويسنده , , A. Belleni Morante، نويسنده , , J. and Cabot، نويسنده , , A. and Arbiol، نويسنده , , J.، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2002
Pages
6
From page
37
To page
42
Abstract
Results of a detailed structural characterization of In2O3 films, deposited by spray pyrolysis from InCl3–water solutions, are presented in this paper. The influence of technological parameters such as precursor concentration in sprayed solution, pyrolysis temperature, and film thickness on morphology, crystallite sizes, texturing, and strains were analyzed. SEM, TEM, XRD, AFM, HRTEM, and laser ellipsometry methods were applied for these purposes. An explanation of observed regularities is also given.
Keywords
In2O3 , Spray pyrolysis , characterization , Film , structure
Journal title
Sensors and Actuators B: Chemical
Serial Year
2002
Journal title
Sensors and Actuators B: Chemical
Record number
1412910
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