The preparation and oxygen-sensing properties of α-Ti3O5 thin film

In this paper, the preparation and oxygen-sensing properties of α-Ti3O5 film are studied. By reducing TiO2 thin films in H2 atmosphere at 1200 and 1250 °C, the Ti3O5 film with orthorhombic structure (α phase) can be obtained. The α-Ti3O5 film is stable up to 650 °C in air. The results of property investigation show that the α-Ti3O5 film has low resistance-temperature coefficient and certain oxygen-sensing properties, however, its oxygen-sensing properties need further improvement. To explain the oxygen-sensing mechanism of the α-Ti3O5 film, the surface phase transition hypothesis is raised.