Title of article
Very sensitive porous silicon NO2 sensor
Author/Authors
G. Pancheri، نويسنده , , L. and Oton، نويسنده , , C.J. and Gaburro، نويسنده , , Z. and Soncini، نويسنده , , G. and Pavesi، نويسنده , , L.، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2003
Pages
3
From page
237
To page
239
Abstract
We report a nitrogen dioxide sensor suitable for environmental control, based on the change in conductivity of a single meso-porous silicon (PS) layer with about 80% porosity. We present the characterization of the sensor in the presence of low concentrations of NO2 in dry air and study the influence of humidity on sensor behaviour. The sensor shows a sensitivity to 12 ppb of NO2 in dry air and a good response to 50 ppb in humid air.
Keywords
Conductivity , NO2 , Porous silicon , Gas sensor
Journal title
Sensors and Actuators B: Chemical
Serial Year
2003
Journal title
Sensors and Actuators B: Chemical
Record number
1413134
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