Computer simulation of the resonance characteristics and the sensitivity of cantilever-shaped Al/PZT/RuO2 biosensor

By computer simulation, the resonant characteristics and the sensitivity of cantilever-shaped Al/PZT/RuO2 resonant biosensor were studied for the application of micro-endoscope. The resonant frequency and sensitivity of the sensor were strongly dependent on the sensor length than the other geometric variations: width, thickness. And the sensing area should be confined near the end of the cantilever sensor for fixed loads to maximize the sensitivity and to enable quantitative analysis of the analyte mass. Good agreement between the experimented and the simulated resonant frequencies was observed.