Electrohydrodynamic atomization deposition of PZT sol–gel slurry and sol infiltration on the films

This paper reports the use of a deposition technique, called electrohydrodynamic atomization, for producing PZT films from a composite sol–gel slurry. PZT slurries of different powder concentrations were prepared, and then atomization deposition of them was carried out and resultant films examined. It was observed that large splats with well-mixed PZT particles in sol and fine PZT clusters with dry PZT particle agglomeration can be deposited using this technique. In particular, intermediated sol infiltration process on the EHDA deposited film under optimized atomization condition was also studied. It was found that the film with sol infiltration process become more dense and the electrical properties (Pr, ɛr) were improved compared with that without sol infiltration after EHDA deposition.