Material properties and the influence of metallic catalysts at the surface of highly dense SnO2 films

We present an approach to optimize the specific response to gases by using specially prepared nanosized platinum on highly dense sputtered polycrystalline SnO2. Structural and morphological analyses of the SnO2 and platinum thin films were performed. Gas measurements were carried out with single chip thin-film SnO2 sensor arrays on silicon substrates. Pt nanoclusters covering the sensitive layer significantly affect the O3, CO and NO2 sensitivities and the corresponding dynamic response.