Title of article
Zn–Sn–Sb–O thin film sensor for ppm-level NO2 detection
Author/Authors
Yamada، نويسنده , , Yasushi and Yamashita، نويسنده , , Katsuji and Masuoka، نويسنده , , Yumi and Seno، نويسنده , , Yoshiki، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2001
Pages
4
From page
12
To page
15
Abstract
Various composition of Zn–Sn–Sb–O thin film was deposited on an alumina substrate by sputtering in O2 and Ar mixture from constituent metal targets. The electrical resistance of Zn–Sn–Sb–O films that compositions were Zn/Sn=2.3 and the Sb/(Zn+Sn+Sb)=0.4 to 0.6 were remarkably low, and showed high sensitivity to 5 ppm NO2 in air at 400 and 600°C. In addition, almost no sensitivity to 50 ppm i-C4H10 and 50 ppm CO was observed.
Keywords
Gas sensor , nitrogen dioxide , Thin film
Journal title
Sensors and Actuators B: Chemical
Serial Year
2001
Journal title
Sensors and Actuators B: Chemical
Record number
1415093
Link To Document