Gas sensing characteristics of SnO2 thin film fabricated by thermal oxidation of a Sn/Pt double layer

SnO2 thin film with homogeneously dispersed nano-crystallite Pt particles was reliably prepared via simple thermal oxidation of a Sn/Pt double layer on Si substrate oxidized. Its surface phase and morphology were probed using some surface sensitive tools such as X-ray diffraction (XRD), atomic force microscopy (AFM) and scanning electron microscopy (SEM). The electrical response of SnO2 thin films to the i-C4H10 gas was systematically investigated at a wide range of temperatures and gas concentrations. In particular, a long-term stability test of the fabricated Pt/SnO2 thin films for the i-C4H10 gas proved its applicability as a reliable gas sensor because of its higher sensing stability than the conventional Pt/SnO2 films over a long period of run time.