Characterization of coupled-domain multi-layer microplates in pull-in phenomenon, vibrations and dynamics

This paper presents a model to analyze pull-in phenomenon, vibrational behavior and dynamics of multi-layer microplates using coupled finite element and finite difference methods (FDM). First-order shear deformation theory (FSDT) is used to model dynamical system using finite element method, while FDM is applied to solve nonlinear Reynolds equation of squeeze film damping. Using this model, pull-in analysis of single- and multi-layer microplates are studied. Vibrational behavior of single- and multi-layer microplates are analyzed to compute resonance frequencies and mode shapes of the system. Also, an algorithm is presented to study dynamics of microplates under the actuation of nonlinear electrostatic force and squeeze film damping. Results for simplified single-layer microplates are validated and in good agreement with the published literature. This investigation can be implemented in the design of multi-layer microplates.