• Title of article

    Swelling and dissolution rate measurements of polymer thin films in supercritical carbon dioxide

  • Author/Authors

    Pham، نويسنده , , Victor Q. and Rao، نويسنده , , Nagesh and Ober، نويسنده , , Christopher K.، نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 2004
  • Pages
    6
  • From page
    323
  • To page
    328
  • Abstract
    The first interferometric dissolution rate monitor (DRM) to probe polymer swelling and dissolution in supercritical carbon dioxide (scCO2) is reported. Refractive index measurements of scCO2 as a function of pressure agree with literature and calculated values using the Lorenz–Lorentz equation, even for short equilibration times. The reflected intensity plot with <2 min of pressure and thermal equilibration time shows ±10−3 deviation from calculation. Maximum swollen film thickness for a scCO2 soluble random copolymer of tetrahydropyranyl methacrylate (35 mol%) and 1H,1H-perfluorooctyl methacrylate (65 mol%) is estimated for pressures 128–197 bar. Dissolution rates show anomalous thickness dependence that can be explained in terms of polymer/surface interactions. It was found that complete film removal requires more than 1000 s below and less than 90 s above ∼191 bar.
  • Keywords
    Supercritical carbon dioxide , Photoresist dissolution , Interferometry , Thin film swelling , Dissolution measurement
  • Journal title
    Journal of Supercritical Fluids
  • Serial Year
    2004
  • Journal title
    Journal of Supercritical Fluids
  • Record number

    1419193