Title of article :
A very sensitive porous silicon based humidity sensor
Author/Authors :
Di Francia، نويسنده , , G. and Castaldo، نويسنده , , A. and Massera، نويسنده , , E. and Nasti، نويسنده , , I. and Quercia، نويسنده , , L. and Rea، نويسنده , , I.، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2005
Abstract :
A relative humidity (RH) sensor device based on n-type porous silicon has been designed, fabricated and characterized. The simple device is a diode reverse dc biased, exhibiting an extremely high sensitivity in ambient air and a large operating range (30–70% RH). Aging and NO2 interference on the sensor performance have been also investigated.
Keywords :
diode , aging , Humidity , RH , Porous silicon
Journal title :
Sensors and Actuators B: Chemical
Journal title :
Sensors and Actuators B: Chemical
