Humidity-insensitive and low oxygen dependence tungsten oxide gas sensors

Gas sensing characteristics of WO3 powder and its physical properties under different heat treatment conditions have been investigated. The WO3 powder was synthesized by wet process from ammonium tungstate parapentahydrate and nitric solution. The precipitated product was then calcined at 300–800 °C for 2–12 h. The physical properties of the products were characterized by using X-ray diffractometer (XRD), scanning electron microscope (SEM), and BET method. It was found that the crystallite size, particle size and surface area of the WO3 powders were in the range of 30–45 nm, 0.1–3.0 μm and 1.2–3.7 m2/g, respectively. Calcination at higher temperature and longer time led to the increase of particle size by more than 300%, and reduction in specific surface area by more than 60%. However, the crystallite size was found to increase only by ∼30% under identical heat treatment. These results inferred that such heat treatment had more profound effect on crystallite aggregation than on crystallite growth. Gas sensing measurement showed that the largest change of output voltage to both ethyl alcohol and ammonia was obtained from the sensor calcined at 600 °C for 2 h, which had the highest surface area. However, the highest sensitivity which is defined as the ratio of sensorʹs resistance in air to that in the sample gas, Rair/Rgas, was obtained from the sensor calcined at 600 °C for 6 h due to its highest background resistance in air. Moreover, it was also found that the sensors were less sensitive to the oxygen content in the carrier gas and did not sensitive at all to water vapor.