• Title of article

    Effect of friction cycles on wear particle generation of carbon nitride coating against a spherical diamond

  • Author/Authors

    Wang، نويسنده , , Dong F and Kato، نويسنده , , Koji، نويسنده ,

  • Issue Information
    ماهنامه با شماره پیاپی سال 2000
  • Pages
    8
  • From page
    115
  • To page
    122
  • Abstract
    The in-situ observations of wear particle generation of carbon nitride coating on silicon repeatedly sliding against a spherical diamond have been studied in terms of the critical friction cycles and normal loads. An environmental scanning electron microscope (E-SEM), in which a pin-on-disk tribotester was installed, has in-situ provided direct evidence of when and how the wear particle generation do occur during the repeated sliding of carbon nitride coating against a spherical diamond. The in-situ observations of non-conductive carbon nitride coating are therefore available free from surface charging with controllable relative humidity. The repeated sliding tests at a sliding speed of 50 μm/s have been carried out with the purpose of observing the ‘No wear particle generation’ region when varying normal load from 10 to 250 mN. It appears that until 20 friction cycles, the maximum Hertzian contact pressure Pmax for ‘No wear particle generation’ can be improved from 1.39 Y to 1.53 Y if silicon is coated by carbon nitride with a thickness of 10 nm, where Y is defined as the yield strength of silicon. The applicable enlargement of the ‘No wear particle generation’ region of carbon nitride coating has therefore been comparatively discussed with the silicon substrate from the view points of the friction coefficient and the specific wear rate. The mode transition maps have also been summarized for the repeated sliding of carbon nitride coating in terms of ‘No wear particle generation’, ‘Wear particle generation by microcutting’ and ‘Wear particle generation by microcutting and microfracturing’ three typical modes.
  • Keywords
    Microelectromechanical system (MEMS) , Wear particle generation , No wear particle generation region , Carbon nitride coating , Silicon , In-situ observations , Critical friction cycles
  • Journal title
    Tribology International
  • Serial Year
    2000
  • Journal title
    Tribology International
  • Record number

    1424408