Tribological properties of nanostructured DLC coatings deposited by C60 ion beam

The frictional and wear characteristics of nanostructured DLC films were investigated. The coatings were deposited on silicon substrates by irradiation of a mass-separated C60 ion beam with 5 keV of energy and a deposition temperature ranging from 100 to 450 °C. The effects of deposition temperature on the surface morphology, nano-structure, mechanical properties and tribological characteristics of the coatings were assessed. Results showed that deposition temperature strongly affects the nanostructure and surface morphology of the coatings. Coatings deposited at temperatures exceeding 350–400 °C exhibited an increase in surface roughness as well as compressive stress due to the formation of graphite, which led to a significant increase in the friction coefficient and wear rate. Coatings deposited at 300 °C showed the best tribological properties.