Author/Authors :
Breil، نويسنده , , R and Fries، نويسنده , , Garnaes، J. نويسنده , , J and Haycocks، نويسنده , , J and Hüser، نويسنده , , D and Joergensen، نويسنده , , J and Kautek، نويسنده , , W and Koenders، نويسنده , , L and Kofod، نويسنده , , N and Koops، نويسنده , , K.R and Korntner، نويسنده , , R and Lindner، نويسنده , , B and Mirandé، نويسنده , , W and Neubauer، نويسنده , , A and Peltonen، نويسنده , , J and Picotto، نويسنده , , G.B and Pisani، نويسنده , , M and ، نويسنده ,
Abstract :
Comparison measurements on reference standards are reported in which 13 partners with different instruments took part. A set of prototype standards which had been produced and calibrated within a European project were used for the measurements. Here, results of measurements on a 240 nm step height standard and a two-dimensional lateral standard with a nominal pitch of 1 μm are reported.
Keywords :
Scanning probe microscopy , Quantitative microscopy , Comparison measurements , Calibration artifacts , Calibration
