Nanometer edge and surface imaging using optical scatter

Imaging of edges to nanometer resolution using a novel non-contact technique is presented. This technique relies on positioning an optical beam to the edge, and simultaneously scanning, and measuring differential changes in off-specular scatter. Data may be used to calculate the radius at the edge to high accuracy. The experimental apparatus is capable of producing diffraction images of features on surfaces arising from processes used in sample preparation. Images of the cleaved edge of an optical fiber, an Au pad on Si, and cleaved quartz measured on this apparatus are presented. This technique could also be utilized to analyze cleaved laser diodes, micro-optics, MEMS devices, and diamond cutting tools.