Dynamic responses of a precision positioning table impacted by a soft-mounted piezoelectric actuator

The piezoelectric actuator, lead zirconate titanate (PZT) actuator, has been used for precision positioning from micrometer down to nanometer scale. In this paper, a soft-mounted PZT actuator is designed with a low-stiffness spring element to achieve a high-accuracy and large-displacement characteristic in precision positioning motion. The motion of the sliding table, the contact force between the hammer and the sliding table, and the stick-slip frictional force caused by the grinded groove are investigated. The governing equations of the distributed and lumped parameter systems are formulated to obtain the dynamic responses, which agree well with the experimental results.