Stiffness modeling of flexure parallel mechanism

Stiffness plays an important role in the precise performance of flexure-based ultra-precision manipulation systems. The finite element method (FEM) is currently used to determine the stiffness of the flexure parallel mechanism (FPM) with specified dimensions and free shape. This paper presents the stiffness model based on the way the flexure members are connected together in serial or parallel combinations. The modeling allows one to formulate the functional relationship between stiffness and dimensions as well as the free shape of the FPM in the design process. For illustration, stiffness matrices of a double linear spring and a three degree-of-freedom (DOF) translational flexure parallel mechanism are established. The proposed analytical model is validated by FEM model and experiments.