Title of article :
Bench-top setup for validation of real time, digital periodic error correction
Author/Authors :
Schmitz، نويسنده , , Tony L. and Houck III، نويسنده , , Lonnie and Chu، نويسنده , , David and Kalem، نويسنده , , Lee، نويسنده ,
Issue Information :
فصلنامه با شماره پیاپی سال 2006
Abstract :
This paper provides experimental validation of the digital first-order periodic error reduction scheme described by Chu and Ray. A bench-top setup of a single-pass, heterodyne Michelson interferometer, designed to minimize common error contributors such as Abbe, dead path and environment, is described. Linear, reciprocating motion generation is achieved using a parallelogram, leaf-type flexure. Periodic error amplitude is varied through independent rotation of a half wave plate and polarizer. Experimental results demonstrate that the correction algorithm can successfully attenuate first-order error to sub-nm levels for a wide range of frequency mixing conditions.
Keywords :
DISPLACEMENT , Cyclic , Nonlinearity , Interferometry , Heterodyne
Journal title :
Precision Engineering
Journal title :
Precision Engineering