Design and evaluation of a mechanical nanomanufacturing system for nanomilling

This paper presents design and evaluation of a mechanical nanomanufacturing system for performing the nanomilling process. The nanomilling process uses a nanotool (an atomic force microscope probe tip) that is rotated at high speeds to fabricate three-dimensional (3D) nano-scale features on a sample surface. After explaining the kinematics of the two nanomilling process configurations, the nanomilling system, including the 3D piezoelectric actuator that rotates the nanotool, the nanopositioning stage that provides the feeding and depth motions, and the software program that controls the nanomilling motions are described. A measurement system is then constructed to measure the dynamic nanomilling motions. A compensation algorithm is developed to enable obtaining desired nanotool motions in the presence of frequency and amplitude-dependent nonlinearities of the 3D piezoelectric actuator. The nanomilling system is then evaluated directly by measuring the nanotool motions, and indirectly by assessing the accuracy of the fabricated nanoscale features. It was shown that the nanomilling system facilitates fabrication of complex nano-scale features with high accuracy through the high-stiffness nanotool assembly and high-frequency (compensated) nanotool motions.