Development and application of micromachined Pd/SnO2 gas sensors with zeolite coatings

Zeolite A (LTA)-coated micromachined sensors have been prepared and used in the sensing of individual gases (H2, CH4, C2H5OH, C3H8 and CO, in the 10–1000 ppm range) and gas mixtures. Unlike previous works with conventional sensors, a hydrothermal synthesis was not used to prepare a zeolite film. Instead, a zeolite coating was formed on top of the Pd/SnO2 surface by microdropping from a zeolite suspension. In spite of this, the response of the sensor with zeolite is significantly different from that of unmodified sensors, and essentially reproduces the performance of zeolite-coated conventional sensors. By avoiding the use of a hydrothermal synthesis the integrity of the sensor is better preserved, and the resulting non-continuous zeolite film has the added advantage of a strong reduction in response times.