Development of an ozone gas sensor using single-walled carbon nanotubes

This study deals with the fabrication of an ozone gas sensor using single-walled carbon nanotubes (SWCNTs) as sensing material. The SWCNTs are dispersed by N,N-dimethylformamide (DMF). The CNT-DMF solution was dropped between interdigitated electrodes’ fingers to fabricate ozone gas sensor. For ozone environment, a commercial ozone generator was introduced. To improve sensor response, the deposited carbon nanotubes network was thermally treated at high temperature in a furnace. The sensor exhibits high sensitivity to ozone gas at concentration as low as 50 ppb, and fast response time, which is promising for future commercialization of carbon nanotubes based ozone gas sensor.