Fabrication and characterization of a miniaturized planar voltammetric sensor array for use in an electronic tongue

A planar voltammetric sensor array for use in an electronic tongue was fabricated using a combination of microfabrication techniques. The techniques of e-beam evaporation and pulsed laser deposition were applied to prepare a device that contained all of the electrodes integrated on a silicon die (6 mm × 6 mm). The working electrodes were metals gold, platinum, iridium and rhodium. They were characterized by SEM and EDX, and by electrochemical investigation of the packaged dies with cyclic voltammetry in solutions of sulfuric acid and of ferrocene carboxylic acid in aqueous buffer solution. The robustness and reproducibility of the devices were assessed by potential cycling in acid solution.