Batron P–Si microsensor for methane and its derivatives

Baytron P–Si chip was made by depositing Baytron P onto a gap of two parallel gold plates on a silicon wafer separated by 150 μm such that the gold plates contact the polymer only in the gap region. The resistance of the polymer was examined at ambient room temperature before and after the exposure of the chip to different concentrations of methane or its derivatives such as chloroform, carbon tetrachloride and methylene chloride. The chip response to methane gas opens up the prospects of its usage at ambient temperature for the industrial and environmental detections in the range of 200–1300 ppm. Among the derivatives of methane, methylene chloride showed the highest response for detection. The mechanism of sensing is discussed.