Title of article
Experiment and theoretical analysis of relative humidity sensor based on film bulk acoustic-wave resonator
Author/Authors
Qiu، نويسنده , , Xiaotun and Tang، نويسنده , , Rui and Zhu، نويسنده , , Jie and Oiler، نويسنده , , Jonathon and Yu، نويسنده , , Cunjiang and Wang، نويسنده , , Ziyu and Yu، نويسنده , , Hongyu، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2010
Pages
4
From page
381
To page
384
Abstract
Relative humidity (RH) was measured with ZnO based film bulk acoustic-wave resonator (FBAR). The resonant frequency of the FBAR decreased linearly in a two-stage manner as the RH increased in the environment. For low RH (RH < 50%), a frequency downshift of 2.2 kHz per 1% RH change was observed. For high RH (RH > 50%), a frequency downshift of 8.5 kHz per 1% RH change was obtained. It was demonstrated that the two-stage response of the FBAR can be interpreted using the power law theory for semiconductor gas sensors and the mass loading effect.
Keywords
Power law , Relative humidity , Film bulk acoustic-wave resonator , ZNO , mass loading
Journal title
Sensors and Actuators B: Chemical
Serial Year
2010
Journal title
Sensors and Actuators B: Chemical
Record number
1438302
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