Compound tin dioxide–tin acetylacetonate thin layers for sensor applications

This paper studies chemical sensors with binary SnO2–SnAcAc compound active layers. The active layers are deposited by pulsed laser deposition technology (KrF excimer laser). The layer morphology (AFM, SEM), electrical parameters (dc-sensitivity, Sdc; phase-angle sensitivity, Spa), dynamic properties (recovery time) of sensors are investigated in dependence on chemical composition. The above-mentioned quantities are evaluated preferably at low working temperature (150 °C). The best achieved results at low temperature: Sdc = 111 (95% SnO2–5% SnAcAc); Spa = 88° (90% SnO2–10% SnAcAc); recovery time τ90 = 50 s at 200 °C (90% SnO2–10% SnAcAc).