Title of article
Quartz crystal microbalance sensor based on nanostructured IrO2
Author/Authors
Chao، نويسنده , , T.W. and Liu، نويسنده , , C.J. and Hsieh، نويسنده , , A.H. and Chang، نويسنده , , H.M. and Huang، نويسنده , , Y.S. and Tsai، نويسنده , , D.S.، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2007
Pages
6
From page
95
To page
100
Abstract
Nanostructured IrO2 crystals are grown on a gold-coated quartz substrate by metal organic chemical vapor deposition (MOCVD), and their gas sensing properties are studied by quartz crystal microbalance (QCM) technique. Several morphologies, such as nanoblade, layered-column, incomplete-nanotube and square-nanorod, are observed at various combinations of substrate temperature and precursor reservoir temperature. Propionic acid is found to be adsorbed and desorbed reversibly on the IrO2 surface at room temperature, and the adsorption property depends on the nanostructure of the IrO2. IrO2 crystals with nanoblade and layered-column morphologies show higher sensitivities to propionic acid than those with incomplete-nanotube and square-nanorod morphologies. An IrO2 QCM sensor sensitive to ppm-level propionic acid vapor at room temperature is demonstrated.
Keywords
MOCVD , IrO2 , QCM , Gas sensor
Journal title
Sensors and Actuators B: Chemical
Serial Year
2007
Journal title
Sensors and Actuators B: Chemical
Record number
1438687
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