Micro gas preconcentrator in porous silicon filled with a carbon absorbent

This paper presents the development of a gas preconcentrator based on a micro-channel in porous silicon filled with carbon nanopowders by a micro-fluidic process. The particularity of this device is its applicability in the fields of atmospheric pollution monitoring by targeting VOCS (volatiles organic compounds). Various designs of micro-devices have been investigated and a special focus has been dedicated to the carbon adsorbent. The optimization of the device and its operation were driven by its future application in outdoor environments. The benefits of using porous silicon to ease the fixing of the carbon absorbent in micro-channels and to modify the gas desorption kinetic are also investigated. Results on a device based on a carbon adsorbent powder filled in a porous silicon micro-channel for benzene preconcentration are reported.