Single dielectric columnar thin film as a humidity sensor

In this work, a low dielectric columnar thin film is prepared by glancing angle deposition and adopted as a humidity sensor. The film can be arranged in a prism coupling system to enhance the polarization conversion (PC) reflectance in a manner that depends on the ambient humidity. The variations in the magnitude of reflectance and the spectrum peak with the humidity are measured and analyzed by effective medium approximation (EMA).