Author/Authors :
Lee، نويسنده , , Eui-Bok and Hwang، نويسنده , , In-Sung and Cha، نويسنده , , Jung-Ho and Lee، نويسنده , , Ho-Jun and Lee، نويسنده , , Won-Bae and Pak، نويسنده , , James Jungho and Lee، نويسنده , , Jong-Heun and Ju، نويسنده , , Byeong-Kwon، نويسنده ,
Abstract :
An integrated catalytic combustion H2 sensor has been fabricated by using MEMS technology. Both the sensing elements and the reference elements could be integrated into the suspended micro heaters connected in a suitable circuit such as a Wheatstone configuration with low power consumption. Two sensitive elements and two reference sensors were integrated together onto a single chip. The size of chip was 5.76 mm2 and the catalytic combustion sensor showed high response to H2 at operating voltage of 1 V. The response and recovery times to 1000 ppm H2 were 0.36 s and 1.29 s, respectively.
