Fabrication of In2O3 based NO2 gas sensor through AC-electrophoretic deposition

In this paper, deposition patterns of the In2O3 nanoparticles deposited by AC electrophoretic method at different frequencies are investigated. Analyzing the results, 10 kHz was chosen as the best frequency for deposition of the material for sensing purposes on substrates patterned with interdigitated electrodes. Sensing properties toward different concentrations of NO2 at 150–300 °C were measured and compared to those of a sensor prepared through sedimentation.