Title of article
Investigation properties of Au–porous a-Si0.70C0.30 as humidity sensor
Author/Authors
Boukezzata، نويسنده , , Assia and Keffous، نويسنده , , Aissa and Nezzal، نويسنده , , Ghania and Gabouze، نويسنده , , Noureddine and Kechouane، نويسنده , , Mohamed and Zaafane، نويسنده , , Kahina and Hammouda، نويسنده , , Amirouche and Simon، نويسنده , , Patrick and Menari، نويسنده , , Hamid، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2013
Pages
8
From page
1183
To page
1190
Abstract
In this letter, we report the study of a humidity sensor based on porous amorphous silicon carbide (PASiC) as a function of exposure time and relative humidity (RH). Resistive humidity sensors Au–PASiC/Si(p) were fabricated through evaporating coplanar interdigital gold electrodes. The PASiC was formed by anodization of a-Si0.70C0.30 in HF/ethylene glycol (ETG) solution at current density of 50 mA/cm2 for 30 s. The structural properties of a-Si0.70C0.30 thin films deposited by DC magnetron co-sputtering using single silicon crystal, 6H-SiC targets and the PASiC films were investigated by FT-IR and Raman spectroscopy. Hygroscopicity was studied by measuring the resistance of the PASiC under various RH. The results show that the measured resistance highly depends on the applied bias voltage. Moreover, the response signal against RH is found linear for an applied voltage of 2 V. Finally, the response and recovery times were determined around 13 s and 20 min, respectively.
Keywords
Porous SiC , electrochemical etching , RH sensors , Au electrodes
Journal title
Sensors and Actuators B: Chemical
Serial Year
2013
Journal title
Sensors and Actuators B: Chemical
Record number
1441382
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