Author/Authors :
Martin، نويسنده , , O. and Gouttenoire، نويسنده , , V. and Villard، نويسنده , , P. and Arcamone، نويسنده , , J. and Petitjean، نويسنده , , M. and Billiot، نويسنده , , G. and Philippe، نويسنده , , J. and Puget، نويسنده , , P. and Andreucci، نويسنده , , P. and Ricoul، نويسنده , , F. and Dupré، نويسنده , , C. and Duraffourg، نويسنده , , L. and Bellemin-Comte، نويسنده , , A. and Ollier، نويسنده , , E. and Colinet، نويسنده , , E. M. Ernst، نويسنده , , T.، نويسنده ,
Abstract :
In this work, a comprehensive, predictive and quantitative model of a whole gas analyzer is provided in order to facilitate the design of such high performance devices. All the pre-analytical (gas separation) and analytical (detection and readout) stages have been modeled and experimentally calibrated. Heterogeneous simulations have been used to quantify the impact of the whole architecture on the output characteristic of the gas analyzer. Finally, the model of the NEMS sensor and the chromatography micro-column assembly has been experimentally validated with TEOX (toluene, ethylbenzene, octane, and xylene) gases.
Keywords :
Nano Electro Mechanical Systems , Chromatography column , MODELING , Gas sensor , MEMS , NEMS
