Author/Authors :
Khatko، نويسنده , , Viacheslav and Gorokh، نويسنده , , Gennadii and Mozalev، نويسنده , , Alexander and Solovei، نويسنده , , Dmitry and Llobet، نويسنده , , Eduard and Vilanova، نويسنده , , Xavier and Correig، نويسنده , , Xavier، نويسنده ,
Abstract :
The gas sensing properties of WO3 thin films deposited on highly ordered nanoporous alumina templates were studied. WO3 films were prepared by rf sputtering of a tungsten target in a mixture of Ar and O2. The WO3-based sensors were selective to NO2, NH3 and ethanol at the temperature range from 150 to 300 °C. A mechanism of the influence of the nanoporous template on the response of the sensing film is discussed.
