Title of article
Electrostatic shutter design for a miniaturized ion mobility spectrometer
Author/Authors
Salleras، نويسنده , , M. and Kalms، نويسنده , , A. and Krenkow، نويسنده , , A. and Kessler، نويسنده , , M. -O Goebel، نويسنده , , J. and Müller، نويسنده , , G. and Marco، نويسنده , , S.، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2006
Pages
5
From page
338
To page
342
Abstract
Electrostatic ion shutters are a key component in ion mobility spectrometry technology. Ion mobility spectrometry instruments may be miniaturized by using MEMS components. In this paper we present an ion shutter made in bulk silicon micromachining. An optimization of the shutter design is made through a physical model. A study has been carried out considering several parameters (electrode geometry, voltage applied) in order to achieve an optimal electrostatic shutter in terms of closure and aperture ratio.
Keywords
MEMS , Ion shutter , Ion mobility spectrometry , Modelling
Journal title
Sensors and Actuators B: Chemical
Serial Year
2006
Journal title
Sensors and Actuators B: Chemical
Record number
1443251
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