Title of article :
Integrated high temperature gas sensor system based on bulk acoustic wave resonators
Author/Authors :
Richter، نويسنده , , D. and Fritze، نويسنده , , H. and Schneider، نويسنده , , T. and Hauptmann، نويسنده , , P. and Bauersfeld، نويسنده , , N. and Kramer، نويسنده , , K.-D. and Wiesner، نويسنده , , K. and Fleischer، نويسنده , , M. and Karle، نويسنده , , G. and Schubert، نويسنده , , A.، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2006
Pages :
6
From page :
466
To page :
471
Abstract :
A high temperature gas sensor system based on bulk acoustic wave resonators is developed. The system consists of CeO2 coated langasite resonators with a special electrode design to detect mechanical and conductivity changes in the sensor film. The data acquisition is performed using a specialized compact impedance analyser and a data processing software using methods of computational intelligence. The system is tested in different atmospheres containing mixtures of CO and H2 and exhibits selectivity to these gases.
Keywords :
High temperature microbalance , Resonant gas sensor , Impedance analyser , Langasite
Journal title :
Sensors and Actuators B: Chemical
Serial Year :
2006
Journal title :
Sensors and Actuators B: Chemical
Record number :
1443270
Link To Document :
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