Resistive oxygen gas sensors based on Ce1−xZrxO2 nano powder prepared using new precipitation method

Nano-sized Zr-doped ceria powders were made by new precipitation method in which conventional carbon powder is used. And, the resistive oxygen sensors based on thick film made from this nano-powder were fabricated. The particle size of Zr-doped ceria powder was 20 nm or less. Powders with Zr concentration of 0–10 mol% were single phase. The particle size of the thick film was about 100 nm. The resistance of the thick film decreased with increasing Zr until 10 mol% and the thick film with 10 mol% Zr had 1/10 times the resistance of thick film without Zr. The response time of the thick film with 10 and 20 mol% Zr was 16 and 9 ms at 1073 K, respectively.