Thermal distribution microfluidic sensor based on silicon

During the measurement and analysis of micro-total analysis system (μ-TAS), the bulk of the sample injected is about nano-liter, so that the study of microfluidic sensor has been becoming an important aspect of the analytical instrument. According to the principle of the thermal distribution pattern, a microfluidic sensor based on silicon is fabricated with the microelectronic technique and micromechanical process in this paper, including a micro-heater and two temperature sensors. Under the operational mode of the constant heating power, the characteristics of the microfluidic sensor are analyzed. The experimental results indicate that the measurement range of the microfluidic sensor is from 10 to 700 μl/min.