Millisecond-order response measurement for fast oxygen gas sensors

A novel method for the evaluation of fast response of oxygen gas sensors in terms of milliseconds is developed. Using the method of modulating oxygen partial pressure by changing the total pressure inside the test chamber, the millisecond-order measurement was succeeded. For the 100 Hz sign-wave operation, the measurement system generated the pressure changes from 180 to 220 kPa, corresponding to the change of oxygen partial pressure from 36 to 44 kPa. Using both jump-method and pressure modulation method, the response of the resistive oxygen sensors of cerium oxide thick films were evaluated at 1173 K and the kinetic mechanism of gas sensing was discussed. Their response times of t90 obtained by square-wave change were measured to be 37 and 22 ms for high-to-low oxygen partial pressure and vice versa transition, respectively. The log–log plot of resistance of sensor and the frequency, pressure modulation spectra, was also evaluated at the same time and the kinetics of oxygen sensing was suggested to be diffusion-limited.