Title of article
EELS microanalysis of polycrystalline silicon thin films for solar cells grown at low temperatures
Author/Authors
Sara Raquel M.M. and Stِger، نويسنده , , Michael and Nelhiebel، نويسنده , , Michael and Schattschneider، نويسنده , , Peter and Schlosser، نويسنده , , Viktor and Breymesser، نويسنده , , Alexander and Jouffrey، نويسنده , , Bernard، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2000
Pages
8
From page
177
To page
184
Abstract
The aim of this work is the quantitative chemical analysis of polycrystalline silicon thin films grown on glass substrates at temperatures <600°C by means of transmission electron microscopy (TEM) and electron energy-loss spectrometry (EELS). Specimens produced with two different methods were investigated. We found significant differences in grain size and morphology, as well as in the distribution of oxygen. A surprisingly high amount of Ba diffusion from the subtrate was detected.
Keywords
Transmission electron microscopy , Electron energy-loss spectrometry , Polycrystalline silicon thin films , chemical vapour deposition
Journal title
Solar Energy Materials and Solar Cells
Serial Year
2000
Journal title
Solar Energy Materials and Solar Cells
Record number
1476544
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