Surface passivation in high efficiency silicon solar cells

Surface passivation for crystalline silicon solar cells is particularly important for devices with open-circuit voltages in excess of 650 mV. Thick passivating thermal oxides, originally developed for use with buried contact solar cells, are shown to produce the most effective and stable surface passivation particularly in conjunction with lightly phosphorus diffused surfaces. However, for improved optical performance, antireflection coatings are only effective with surface oxide thicknesses reduced to 100–200 Å. Thinner passivating oxides cause significant voltage loss, most of which can be recovered through hydrogen passivation. Throughout this study, variation in surface passivation approaches has produced open-circuit voltages ranging from 620 mV to record voltages of 720 mV.