Deposition of Ag-based Al-doped ZnO multilayer coatings for the transparent conductive electrodes by electron beam evaporation

Silver-based Al-doped ZnO (AZO) multilayer coatings were prepared on glass by e-beam evaporation techniques. Optimization of the deposition conditions of both AZO and Ag layers were performed for better electrical and optical properties. The properties of the multilayers were affected by the deposition process of both AZO and Ag layers. The best multilayer coatings exhibit low sheet resistance of 5.34 Ω/sq and transmittance of more than 85%. The coatings have satisfactory properties of low resistance and high transmittance for application as transparent conductive electrodes.