Disordered submicron structures integrated on glass substrate for broadband absorption enhancement of thin-film solar cells

We report the effect of antireflective disordered submicron structures (d-SMSs) on glass substrates for the absorption enhancement of thin-film solar cells. The shape and height of d-SMSs were designed on the basis of the calculation result from the rigorous coupled wave analysis (RCWA) method. The d-SMSs with tapered shape were fabricated on the back side of SnO2:F covered glass substrate by plasma etching of thermally dewetted silver (Ag) nanoparticles without any lithography processes. The glass substrates with d-SMSs showed very low reflectance compared to that of the glass substrates with flat surface over a wide specular and angular range. Thin-film hydrogenated amorphous silicon (a-Si:H) solar cells were prepared on the opposite side of d-SMSs integrated glass substrates, and the devices exhibited a short-circuit current density (Jsc) of 6.84% increased value compared to the reference cells with flat surface without detrimental changes in the open circuit voltages (Voc) and fill factor. Also, it is found that the performance of the solar cells is sustained over a wide incident angle of light.