Properties of nanocrystalline and nanocomposite WxZr1−x thin films deposited by co-sputtering

WxZr1−x thin films were deposited at room temperature on glass substrates by co-sputtering tungsten and zirconium targets in argon. The composition was found in the range 0 ≤ x ≤ 0.81. The grain size deduced from X-ray diffraction analysis ranged from 1.3 nm to 16 nm depending on the composition. The events in the resistivity, optical reflectivity and thickness evolutions were correlated with the X-ray diffraction analysis. Depending on the composition, the local organization can be attributed to a nanocrystalline solid solution of W in Zr, to a nanocomposite structure involving ZrW2 nanograins embedded in an amorphous matrix, to ZrW2 Laves phase nanograins and to a nanocrystalline solid solution of Zr in W. For 0 < x ≤ 0.72, the equivalent grain size is very small (less than 2 nm) and the evolution of the resistivity can be fitted by the estimated volume of the material perturbed by the grain boundaries.