Automated trace anion determinations in concentrated electronic grade phosphoric acid by ion chromatography

Modifications have been made to the method of ion-exclusion pre-separation followed by ion exchange with conductivity detection for the determination of trace levels of chloride, sulfate and nitrate in concentrated phosphoric acid. Ion-exclusion separation and pre-concentration of impurity anions is performed using Dionex AS6-ICE and AS11-HC (4 mm) columns, respectively, with water eluent. Final separation is performed using Dionex AG11-HC and AS11-HC (2 mm) columns, KOH gradient elution, and suppressed conductivity detection. Improvements to the method include addition of an autosampler and eluent generator, and use of external standard calibration. These instrumental and procedural changes significantly improve the method’s throughput, while the method’s capability relative to phosphoric acid specifications is maintained, as verified through statistical evaluation of control sample analyses. Detection limits of 60, 680, and 40 ppb (w/w) are obtained vs. semiconductor-grade phosphoric acid specifications of 1000, 12 000, and 5000 ppb for chloride, sulfate, and nitrate, respectively.