Title of article
Mixed-hybrid finite elements for the simulation of thermal oxidation in semiconductors
Author/Authors
Causin، نويسنده , , Paola and Sacco، نويسنده , , Riccardo، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2004
Pages
11
From page
95
To page
105
Abstract
In this paper, we present and analyze a dual-mixed hybrid formulation capable of treating in a unified framework both compressible and incompressible problems in continuum mechanics. The potentialities of this approach are exploited in the computation of the stress field required in the simulation of the thermal oxidation process in semiconductor device technology.
Keywords
Dual-mixed finite elements , Thermal oxidation process , Semiconductor technology , Compressible and incompressible fluid mechanical problems , Hybrid finite elements
Journal title
Journal of Computational and Applied Mathematics
Serial Year
2004
Journal title
Journal of Computational and Applied Mathematics
Record number
1552590
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