Adomian decomposition method used for solving nonlinear pull-in behavior in electrostatic micro-actuators

Nonlinear pull-in behavior for different electrostatic micro-actuators were simulated in this study. The Adomian decomposition method was employed to overcome the difficulty in the nonlinear equation of motion. Because no iteration is required in solving the nonlinear deformation, the decomposition method is one of the most efficient methods for evaluating the unstable pull-in behavior of an electrostatic micro-actuator. To investigate the feasibility of applying the Adomian decomposition method in dealing with the nonlinear deflection equation in the micro-actuator problem, different types of micro-actuators, e.g., fixed-fixed beam actuator and cantilever beam actuator were studied and analyzed. The calculated results agreed well with those from the literature.